China startup demoes prototype EUV light source — 15W of output power and 90% domestic components, still years…

· Tom's Hardware ·

1 min read Original article ↗

Being unable to procure EUV litho tools from ASML, China must develop such systems locally, so from time to time we learn about an EUV-related 'breakthrough' in China that will turn into an actual EUV scanner over the following several years. This week, Chinese startup Langdao Silex demonstrated a prototype extreme ultraviolet (EUV) light source with over 15W of output power, 90% domestic components, and decent uptime. The company will need another three to five years to commercialize its technology, reports TrendForce, citing various sources. Yet, a light source alone does not make an EUV scanner.

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